Frequency Adjustment of Microelectromechanical Cantilevers using Electrostatic Pull Down

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dc.contributor.authorKafumbe, S. M. M.
dc.contributor.authorBurdess, J. S.
dc.contributor.authorHarris, A. J.
dc.date.accessioned2023-02-21T16:25:50Z
dc.date.available2023-02-21T16:25:50Z
dc.date.issued2005
dc.description.abstractIn this paper, a new way of actively tuning the resonant frequency of vibrating microelectromechanical devices by electrostatically adjusting the length of the resonating structure is explored. Variations in micromachining processes cause submicron differences in the size of fabricated micromachined devices, which lead to frequency variations in resonators. For radio frequency (RF) applications where high frequency selectivity and low noise frequency manipulation are key performance issues, micromachined resonators need to output a fixed frequency if they are to replace current off-chip, passive devices. This motivates the investigation of post-fabrication techniques that compensate for fabrication defects and errors, and shift the resonant frequency to its designed value. A simple universal analytical model has been developed to investigate the different states a cantilever undergoes during pull-in due to an applied voltage. The beam's natural frequencies throughout these states have been plotted. It is shown that the frequency can be changed by a factor of 4 during pull down, and thereafter increased proportionally with actuation provided an initial minimum voltage was applied.en_US
dc.identifier.citationKafumbe, S. M. M., Burdess, J. S., & Harris, A. J. (2005). Frequency adjustment of microelectromechanical cantilevers using electrostatic pull down. Journal of Micromechanics and Microengineering, 15(5), 1033.DOI 10.1088/0960-1317/15/5/020en_US
dc.identifier.urihttps://nru.uncst.go.ug/handle/123456789/7915
dc.language.isoenen_US
dc.publisherJournal of Micromechanics and Microengineeringen_US
dc.subjectFrequencyen_US
dc.subjectmicroelectromechanicalen_US
dc.subjectelectrostaticen_US
dc.titleFrequency Adjustment of Microelectromechanical Cantilevers using Electrostatic Pull Downen_US
dc.typeArticleen_US
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