RF Tuning Micro Cantilever Array Design, Modeling, and simulation

dc.contributor.authorKafumbe, Said
dc.contributor.authorAlun Harris, Jim Burdess
dc.date.accessioned2023-02-21T12:09:53Z
dc.date.available2023-02-21T12:09:53Z
dc.date.issued2018
dc.description.abstractMEMS cantilever arrays can be used as non-destructive alternatives during frequency tuning applications. This is because a small electrostatic voltage applied between the cantilever and the bottom electrode is enough to pull it down. Further perturbations can be used to resonate the beam at a different frequency. However, before such micro cantilevers can be designed and fabricated, analytical and numeric modelling and simulation is helpful in the validation of the concept. This paper presents the modelling and simulation of MEMS cantilevers that are used in frequency tuning applications.en_US
dc.identifier.citationKafumbe, S., HARRIS, A., & BURDESS, J. RF Tuning Micro Cantilever Array Design, Modeling, and simulation.en_US
dc.identifier.urihttps://nru.uncst.go.ug/handle/123456789/7902
dc.language.isoenen_US
dc.publisherIEOM Society Internationalen_US
dc.subjectMEMSen_US
dc.subjectcantileversen_US
dc.subjectelectrostatic actuationen_US
dc.subjectpiezo electric actuationen_US
dc.subjectmodellingen_US
dc.subjectsimulationen_US
dc.titleRF Tuning Micro Cantilever Array Design, Modeling, and simulationen_US
dc.typePresentationen_US
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